Li, B., Shen, K., Song, Z., Lyu, B., & Zhao, W. Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network. IEEE.
Chicago Style (17th ed.) CitationLi, Binjie, Kuan Shen, Zhilong Song, Binghai Lyu, and Wenhong Zhao. Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network. IEEE.
MLA (9th ed.) CitationLi, Binjie, et al. Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network. IEEE.
Warning: These citations may not always be 100% accurate.