Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits
In order to meet the application requirements for high-precision and low-noise accelerometers in micro-vibration measurement and navigation fields, this paper presents the design and testing of an ultra-high-capacitance resolution capacitive readout circuit with attofarad-level precision. First, a d...
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| Language: | English |
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MDPI AG
2025-04-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/25/8/2461 |
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| author | Guoteng Ren Saifei Yuan Jingjing Peng Ruitao Liu Yuhao Feng Haonan Liu Wenshuai Lu Fei Xing Ting Sun Shijie Yu |
| author_facet | Guoteng Ren Saifei Yuan Jingjing Peng Ruitao Liu Yuhao Feng Haonan Liu Wenshuai Lu Fei Xing Ting Sun Shijie Yu |
| author_sort | Guoteng Ren |
| collection | DOAJ |
| description | In order to meet the application requirements for high-precision and low-noise accelerometers in micro-vibration measurement and navigation fields, this paper presents the design and testing of an ultra-high-capacitance resolution capacitive readout circuit with attofarad-level precision. First, a differential charge amplifier circuit is employed for the first stage of capacitance detection. To suppress noise interference in the circuit, a frequency-domain modulation technique is utilized to mitigate low-frequency noise. Subsequently, a differential subtraction circuit is implemented to reduce common-mode noise. Additionally, an improved filtering circuit is designed to suppress noise interference in the final stage. The test results indicate that the designed circuit operates at a carrier frequency of 1 MHz, achieving a capacitance resolution of up to 0.103 aF/H<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mi mathvariant="normal">z</mi><mrow><mn>1</mn><mo>/</mo><mn>2</mn></mrow></msup></semantics></math></inline-formula> and a noise floor of 25.6 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>g/H<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mi mathvariant="normal">z</mi><mrow><mn>1</mn><mo>/</mo><mn>2</mn></mrow></msup></semantics></math></inline-formula>, thereby meeting the requirements for high-precision and low-noise capacitance detection in MEMS accelerometers. |
| format | Article |
| id | doaj-art-e8720a0436ed432fb1268e3f842a06a7 |
| institution | OA Journals |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj-art-e8720a0436ed432fb1268e3f842a06a72025-08-20T02:18:04ZengMDPI AGSensors1424-82202025-04-01258246110.3390/s25082461Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout CircuitsGuoteng Ren0Saifei Yuan1Jingjing Peng2Ruitao Liu3Yuhao Feng4Haonan Liu5Wenshuai Lu6Fei Xing7Ting Sun8Shijie Yu9College of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaState Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100095, ChinaState Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100095, ChinaState Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100095, ChinaCollege of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaCollege of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaState Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100095, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaCollege of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaCollege of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaIn order to meet the application requirements for high-precision and low-noise accelerometers in micro-vibration measurement and navigation fields, this paper presents the design and testing of an ultra-high-capacitance resolution capacitive readout circuit with attofarad-level precision. First, a differential charge amplifier circuit is employed for the first stage of capacitance detection. To suppress noise interference in the circuit, a frequency-domain modulation technique is utilized to mitigate low-frequency noise. Subsequently, a differential subtraction circuit is implemented to reduce common-mode noise. Additionally, an improved filtering circuit is designed to suppress noise interference in the final stage. The test results indicate that the designed circuit operates at a carrier frequency of 1 MHz, achieving a capacitance resolution of up to 0.103 aF/H<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mi mathvariant="normal">z</mi><mrow><mn>1</mn><mo>/</mo><mn>2</mn></mrow></msup></semantics></math></inline-formula> and a noise floor of 25.6 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>g/H<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mi mathvariant="normal">z</mi><mrow><mn>1</mn><mo>/</mo><mn>2</mn></mrow></msup></semantics></math></inline-formula>, thereby meeting the requirements for high-precision and low-noise capacitance detection in MEMS accelerometers.https://www.mdpi.com/1424-8220/25/8/2461accelerometerhigh-resolution capacitancelow noisereadout circuit |
| spellingShingle | Guoteng Ren Saifei Yuan Jingjing Peng Ruitao Liu Yuhao Feng Haonan Liu Wenshuai Lu Fei Xing Ting Sun Shijie Yu Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits Sensors accelerometer high-resolution capacitance low noise readout circuit |
| title | Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits |
| title_full | Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits |
| title_fullStr | Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits |
| title_full_unstemmed | Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits |
| title_short | Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits |
| title_sort | attofarad class ultra high capacitance resolution capacitive readout circuits |
| topic | accelerometer high-resolution capacitance low noise readout circuit |
| url | https://www.mdpi.com/1424-8220/25/8/2461 |
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