Effect of tool angle in nanocutting of single crystal GaN using diamond cutter
ObjectivesSingle-crystal gallium nitride (GaN) is a pivotal semiconductor material widely utilized in high-power, high-frequency electronic devices, and optoelectronic applications. However, its inherent hardness and brittleness pose significant challenges in achieving damage-free surfaces during ul...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2025-06-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2024.0186 |
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