A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm
In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphra...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
OICC Press
2024-02-01
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| Series: | Majlesi Journal of Electrical Engineering |
| Subjects: | |
| Online Access: | https://oiccpress.com/mjee/article/view/4800 |
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