A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm
In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphra...
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| Format: | Article |
| Language: | English |
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OICC Press
2024-02-01
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| Series: | Majlesi Journal of Electrical Engineering |
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| Online Access: | https://oiccpress.com/mjee/article/view/4800 |
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| author | Bahram Azizollah Ganji Mehdi Taybi |
| author_facet | Bahram Azizollah Ganji Mehdi Taybi |
| author_sort | Bahram Azizollah Ganji |
| collection | DOAJ |
| description | In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphragms, and also open-circuit sensitivity and pull-in voltage of sensors are calculated using MATLAB and simulated using FEM (finite element method). The results show that the displacement and mechanical sensitivity of corrugated diaphragm are bigger than the flat one. The pull-in voltage of corrugated sensor is smaller and the open-circuit sensitivity is much higher than the sensor with flat diaphragm. The results also show that the analytical model is very close with FEM simulation results. |
| format | Article |
| id | doaj-art-e68958865b0f40ad9e63c6209658a1eb |
| institution | DOAJ |
| issn | 2345-377X 2345-3796 |
| language | English |
| publishDate | 2024-02-01 |
| publisher | OICC Press |
| record_format | Article |
| series | Majlesi Journal of Electrical Engineering |
| spelling | doaj-art-e68958865b0f40ad9e63c6209658a1eb2025-08-20T03:04:17ZengOICC PressMajlesi Journal of Electrical Engineering2345-377X2345-37962024-02-01114A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated DiaphragmBahram Azizollah Ganji0Mehdi Taybi1Department of Electrical and Computer Engineering, Babol University of Technology, BabolDepartment of Electrical and Computer Engineering, Babol University of Technology, Babol, IranIn this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphragms, and also open-circuit sensitivity and pull-in voltage of sensors are calculated using MATLAB and simulated using FEM (finite element method). The results show that the displacement and mechanical sensitivity of corrugated diaphragm are bigger than the flat one. The pull-in voltage of corrugated sensor is smaller and the open-circuit sensitivity is much higher than the sensor with flat diaphragm. The results also show that the analytical model is very close with FEM simulation results.https://oiccpress.com/mjee/article/view/4800MEMSAcoustic sensorCorrugated diaphragmStressSensitivity |
| spellingShingle | Bahram Azizollah Ganji Mehdi Taybi A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm Majlesi Journal of Electrical Engineering MEMS Acoustic sensor Corrugated diaphragm Stress Sensitivity |
| title | A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm |
| title_full | A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm |
| title_fullStr | A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm |
| title_full_unstemmed | A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm |
| title_short | A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm |
| title_sort | novel high sensitivity mems acoustic sensor using corrugated diaphragm |
| topic | MEMS Acoustic sensor Corrugated diaphragm Stress Sensitivity |
| url | https://oiccpress.com/mjee/article/view/4800 |
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