Fabrication of 3D Nanostructures via AFM-Based Nanolithography
The increasing use of nanomaterials in high-tech devices has posed an exciting challenge for the scientific community to develop new, easy, high-throughput nanofabrication approaches. Here, we present an easy AFM-based nanofabrication approach based on Static Plowing Lithography, with which we are a...
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| Format: | Article |
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MDPI AG
2024-03-01
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/56 |
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| author | Lorenzo Vincenti Paolo Pellegrino Isabella Farella Mariafrancesca Cascione Valeria De Matteis Fabio Quaranta Rosaria Rinaldi |
| author_facet | Lorenzo Vincenti Paolo Pellegrino Isabella Farella Mariafrancesca Cascione Valeria De Matteis Fabio Quaranta Rosaria Rinaldi |
| author_sort | Lorenzo Vincenti |
| collection | DOAJ |
| description | The increasing use of nanomaterials in high-tech devices has posed an exciting challenge for the scientific community to develop new, easy, high-throughput nanofabrication approaches. Here, we present an easy AFM-based nanofabrication approach based on Static Plowing Lithography, with which we are able to realize patterns of 3D nanostructures on a thin PMMA layer. By coupling a wet etching process with ultrasound exposure, we effectively removed the polymer bulges at the nanostructure’s borders, increasing the quality of the patterned 3D nanostructures, and paving the way for their integration into lab-on-a-chip devices. |
| format | Article |
| id | doaj-art-e602799952694d0f8a7a93120d3012fe |
| institution | OA Journals |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-e602799952694d0f8a7a93120d3012fe2025-08-20T02:01:16ZengMDPI AGProceedings2504-39002024-03-019715610.3390/proceedings2024097056Fabrication of 3D Nanostructures via AFM-Based NanolithographyLorenzo Vincenti0Paolo Pellegrino1Isabella Farella2Mariafrancesca Cascione3Valeria De Matteis4Fabio Quaranta5Rosaria Rinaldi6Department of Mathematics and Physics “E. De Giorgi”, University of Salento, Via Monteroni, 73100 Lecce, ItalyDepartment of Mathematics and Physics “E. De Giorgi”, University of Salento, Via Monteroni, 73100 Lecce, ItalyInstitute for Microelectronics and Microsystems (IMM), CNR, Via Monteroni, 73100 Lecce, ItalyDepartment of Mathematics and Physics “E. De Giorgi”, University of Salento, Via Monteroni, 73100 Lecce, ItalyDepartment of Mathematics and Physics “E. De Giorgi”, University of Salento, Via Monteroni, 73100 Lecce, ItalyInstitute for Microelectronics and Microsystems (IMM), CNR, Via Monteroni, 73100 Lecce, ItalyDepartment of Mathematics and Physics “E. De Giorgi”, University of Salento, Via Monteroni, 73100 Lecce, ItalyThe increasing use of nanomaterials in high-tech devices has posed an exciting challenge for the scientific community to develop new, easy, high-throughput nanofabrication approaches. Here, we present an easy AFM-based nanofabrication approach based on Static Plowing Lithography, with which we are able to realize patterns of 3D nanostructures on a thin PMMA layer. By coupling a wet etching process with ultrasound exposure, we effectively removed the polymer bulges at the nanostructure’s borders, increasing the quality of the patterned 3D nanostructures, and paving the way for their integration into lab-on-a-chip devices.https://www.mdpi.com/2504-3900/97/1/563D AFM nanolithographynanostructuresscratchingAtomic Force Microscopy |
| spellingShingle | Lorenzo Vincenti Paolo Pellegrino Isabella Farella Mariafrancesca Cascione Valeria De Matteis Fabio Quaranta Rosaria Rinaldi Fabrication of 3D Nanostructures via AFM-Based Nanolithography Proceedings 3D AFM nanolithography nanostructures scratching Atomic Force Microscopy |
| title | Fabrication of 3D Nanostructures via AFM-Based Nanolithography |
| title_full | Fabrication of 3D Nanostructures via AFM-Based Nanolithography |
| title_fullStr | Fabrication of 3D Nanostructures via AFM-Based Nanolithography |
| title_full_unstemmed | Fabrication of 3D Nanostructures via AFM-Based Nanolithography |
| title_short | Fabrication of 3D Nanostructures via AFM-Based Nanolithography |
| title_sort | fabrication of 3d nanostructures via afm based nanolithography |
| topic | 3D AFM nanolithography nanostructures scratching Atomic Force Microscopy |
| url | https://www.mdpi.com/2504-3900/97/1/56 |
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