Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer
An Abramson-type oblique-incident interferometer was used for the surface-form measurement of hand-scraped marks consisting of rough surfaces. Although the Abramson interferometer could measure the rough surface of hand-scraped marks under noncontact conditions, the inconsistency in the measurement...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Metrology |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8244/5/2/34 |
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