Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
Dynamic accuracy and synchronization of high-speed interferometry are crucial for advanced manufacturing, semiconductor fabrication, and dynamic metrology, where asynchronous errors introduced by the nonlinear phase responses of photodetectors can severely degrade the measurement performance. The co...
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| Main Authors: | Yunke Sun, Yifei Xie, Xiaotong Yan, Xu Xing, Pengcheng Hu |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
|
| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11034693/ |
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