Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals

Dynamic accuracy and synchronization of high-speed interferometry are crucial for advanced manufacturing, semiconductor fabrication, and dynamic metrology, where asynchronous errors introduced by the nonlinear phase responses of photodetectors can severely degrade the measurement performance. The co...

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Main Authors: Yunke Sun, Yifei Xie, Xiaotong Yan, Xu Xing, Pengcheng Hu
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/11034693/
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author Yunke Sun
Yifei Xie
Xiaotong Yan
Xu Xing
Pengcheng Hu
author_facet Yunke Sun
Yifei Xie
Xiaotong Yan
Xu Xing
Pengcheng Hu
author_sort Yunke Sun
collection DOAJ
description Dynamic accuracy and synchronization of high-speed interferometry are crucial for advanced manufacturing, semiconductor fabrication, and dynamic metrology, where asynchronous errors introduced by the nonlinear phase responses of photodetectors can severely degrade the measurement performance. The complex cross-physical processes make the phase responses of photodetectors challenging. Owing to their bandwidth, resolution, and test deviation limitations, the existing methods are not applicable to interferometric photodetectors. In this study, we employ a commonly available small form-factor pluggable module to generate optical pseudorandom signals as a photodetector’s excitation signals. Through correlation operations and phase spectrum analysis, the phase response of a photodetector with a 10-MHz bandwidth is identified with a model reliability of 90% and an uncertainty of 0.50° (k = 2). In practical applications, the identified phase response can help an interferometer suppress asynchronous errors to the sub-nm level within a maximum speed of 1.58 m/s. Comparative experiments verify the accuracy of the identified results and highlight substantial improvements in test precision, frequency resolution, practicality, and universality over existing methods.
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institution Kabale University
issn 1943-0655
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publishDate 2025-01-01
publisher IEEE
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series IEEE Photonics Journal
spelling doaj-art-e50509d643344d0c9d9f9bfedd27029a2025-08-20T03:29:23ZengIEEEIEEE Photonics Journal1943-06552025-01-0117411010.1109/JPHOT.2025.357950611034693Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom SignalsYunke Sun0https://orcid.org/0000-0003-4845-1831Yifei Xie1https://orcid.org/0009-0001-1384-5518Xiaotong Yan2https://orcid.org/0009-0003-3872-9681Xu Xing3https://orcid.org/0000-0002-3312-4574Pengcheng Hu4https://orcid.org/0000-0002-2471-7036Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and the Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin Institute of Technology, Harbin, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and the Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin Institute of Technology, Harbin, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and the Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin Institute of Technology, Harbin, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and The Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin Institute of Technology, Harbin, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, and The Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin Institute of Technology, Harbin, ChinaDynamic accuracy and synchronization of high-speed interferometry are crucial for advanced manufacturing, semiconductor fabrication, and dynamic metrology, where asynchronous errors introduced by the nonlinear phase responses of photodetectors can severely degrade the measurement performance. The complex cross-physical processes make the phase responses of photodetectors challenging. Owing to their bandwidth, resolution, and test deviation limitations, the existing methods are not applicable to interferometric photodetectors. In this study, we employ a commonly available small form-factor pluggable module to generate optical pseudorandom signals as a photodetector’s excitation signals. Through correlation operations and phase spectrum analysis, the phase response of a photodetector with a 10-MHz bandwidth is identified with a model reliability of 90% and an uncertainty of 0.50° (k = 2). In practical applications, the identified phase response can help an interferometer suppress asynchronous errors to the sub-nm level within a maximum speed of 1.58 m/s. Comparative experiments verify the accuracy of the identified results and highlight substantial improvements in test precision, frequency resolution, practicality, and universality over existing methods.https://ieeexplore.ieee.org/document/11034693/Correlation operationslaser interferometryphase responsephotodetectorspseudorandom signalssystem identification
spellingShingle Yunke Sun
Yifei Xie
Xiaotong Yan
Xu Xing
Pengcheng Hu
Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
IEEE Photonics Journal
Correlation operations
laser interferometry
phase response
photodetectors
pseudorandom signals
system identification
title Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
title_full Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
title_fullStr Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
title_full_unstemmed Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
title_short Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals
title_sort phase response identification of photodetectors in high speed interferometry using photoelectric pseudorandom signals
topic Correlation operations
laser interferometry
phase response
photodetectors
pseudorandom signals
system identification
url https://ieeexplore.ieee.org/document/11034693/
work_keys_str_mv AT yunkesun phaseresponseidentificationofphotodetectorsinhighspeedinterferometryusingphotoelectricpseudorandomsignals
AT yifeixie phaseresponseidentificationofphotodetectorsinhighspeedinterferometryusingphotoelectricpseudorandomsignals
AT xiaotongyan phaseresponseidentificationofphotodetectorsinhighspeedinterferometryusingphotoelectricpseudorandomsignals
AT xuxing phaseresponseidentificationofphotodetectorsinhighspeedinterferometryusingphotoelectricpseudorandomsignals
AT pengchenghu phaseresponseidentificationofphotodetectorsinhighspeedinterferometryusingphotoelectricpseudorandomsignals