Engineering high-Q superconducting tantalum microwave coplanar waveguide resonators for compact coherent quantum circuit

Engineering high-Q superconducting tantalum microwave coplanar waveguide resonators for compact coherent quantum circuit

Abstract Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility with complementary metal-oxide-semiconductor (CMOS)...

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Bibliographic Details
Main Authors: Shima Poorgholam-Khanjari, Valentino Seferai, Paniz Foshat, Calum Rose, Hua Feng, Robert H. Hadfield, Martin Weides, Kaveh Delfanazari
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-025-11744-x
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