Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actua...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
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| Series: | The Scientific World Journal |
| Online Access: | http://dx.doi.org/10.1155/2014/912683 |
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