On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition

On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition

Abstract This work presents a study of piezoelectric zinc oxide (ZnO) thin films deposited by a novel post‐reactive sputtering method. The process utilizes a rotating drum with DC magnetron sputtering deposition onto substrates with subsequent DC plasma‐assisted oxidation of the deposited metal to m...

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Bibliographic Details
Main Authors: Michael McKinlay, Lewis Fleming, Manuel Pelayo García, Lucía Nieto Sierra, Pilar Villar Castro, Daniel Araujo, Basilio Javier García, Des Gibson, Carlos García Nuñez
Format: Article
Language:English
Published: Wiley-VCH 2024-11-01
Series:Advanced Materials Interfaces
Subjects:
optoelectronics
piezoelectrics
plasma physics
plasma‐assisted magnetron sputtering, PVD
thin film deposition
zinc oxide
Online Access:https://doi.org/10.1002/admi.202400252
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