Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)

Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within...

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Bibliographic Details
Main Authors:	D. I. Chernyavsky, D. D. Chernyavsky
Format:	Article
Language:	English
Published:	Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2021-03-01
Series:	Омский научный вестник
Subjects:	microtechnology microelectromechanical systems (mems) microoptoelectromechanical devices (moems) similarity theory energy conservation law mechanical drive of micromirrors kinematics mechanical strength
Online Access:	https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf
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Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)

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