Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)
Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within...
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| Format: | Article |
| Language: | English |
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Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2021-03-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
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| _version_ | 1832574067693060096 |
|---|---|
| author | D. I. Chernyavsky D. D. Chernyavsky |
| author_facet | D. I. Chernyavsky D. D. Chernyavsky |
| author_sort | D. I. Chernyavsky |
| collection | DOAJ |
| description | Currently, the development and application of micro
machines is an important direction in the development
of microelectromechanical systems (MEMS) technologies.
In these devices, electromechanical energy conversion
occurs, as a result of which forces arise that carry out
mechanical work within the dimensions of the microcircuit
case.
The paper considers the kinematic calculation of the
design of a micromirror with a reflective layer of high
optical quality of the surface for deflecting the reflected
laser beam. By changing the angle of inclination of the
micromirror, the laser beam enters the various input
channels of the optical sensor. In this case, a control signal
is generated for the further operation of the microcircuit.
Thus, the micromirror performs the function of a switch of
input optical channels, connecting in various combinations
certain input or output elements of the microcircuit for
further processing.
The article presents the calculation of the kinematic
parameters of the mechanical structure of the micro mirror.
Practical recommendations are given for choosing the
optimal range of variation of the micro mirror tilt angles
in order to increase the strength of its structure, as well as
to reduce the power of the mechanical drive of the micro
machine required to change the micro mirror tilt angles. |
| format | Article |
| id | doaj-art-e481976c80e447d099cce292b7f32e15 |
| institution | Kabale University |
| issn | 1813-8225 2541-7541 |
| language | English |
| publishDate | 2021-03-01 |
| publisher | Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education |
| record_format | Article |
| series | Омский научный вестник |
| spelling | doaj-art-e481976c80e447d099cce292b7f32e152025-02-02T01:12:01ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412021-03-011 (175)51110.25206/1813-8225-2021-175-5-11Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)D. I. Chernyavsky0https://orcid.org/0000-0002-7585-433XD. D. Chernyavsky1Omsk State Technical UniversityOmsk State Technical UniversityCurrently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within the dimensions of the microcircuit case. The paper considers the kinematic calculation of the design of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch of input optical channels, connecting in various combinations certain input or output elements of the microcircuit for further processing. The article presents the calculation of the kinematic parameters of the mechanical structure of the micro mirror. Practical recommendations are given for choosing the optimal range of variation of the micro mirror tilt angles in order to increase the strength of its structure, as well as to reduce the power of the mechanical drive of the micro machine required to change the micro mirror tilt angles.https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdfmicrotechnologymicroelectromechanical systems (mems)microoptoelectromechanical devices (moems)similarity theoryenergy conservation lawmechanical drive of micromirrorskinematicsmechanical strength |
| spellingShingle | D. I. Chernyavsky D. D. Chernyavsky Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) Омский научный вестник microtechnology microelectromechanical systems (mems) microoptoelectromechanical devices (moems) similarity theory energy conservation law mechanical drive of micromirrors kinematics mechanical strength |
| title | Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) |
| title_full | Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) |
| title_fullStr | Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) |
| title_full_unstemmed | Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) |
| title_short | Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) |
| title_sort | kinematic calculation of micro mirror elements in micro electro mechanical systems mems |
| topic | microtechnology microelectromechanical systems (mems) microoptoelectromechanical devices (moems) similarity theory energy conservation law mechanical drive of micromirrors kinematics mechanical strength |
| url | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
| work_keys_str_mv | AT dichernyavsky kinematiccalculationofmicromirrorelementsinmicroelectromechanicalsystemsmems AT ddchernyavsky kinematiccalculationofmicromirrorelementsinmicroelectromechanicalsystemsmems |