Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)
Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2021-03-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
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| Summary: | Currently, the development and application of micro
machines is an important direction in the development
of microelectromechanical systems (MEMS) technologies.
In these devices, electromechanical energy conversion
occurs, as a result of which forces arise that carry out
mechanical work within the dimensions of the microcircuit
case.
The paper considers the kinematic calculation of the
design of a micromirror with a reflective layer of high
optical quality of the surface for deflecting the reflected
laser beam. By changing the angle of inclination of the
micromirror, the laser beam enters the various input
channels of the optical sensor. In this case, a control signal
is generated for the further operation of the microcircuit.
Thus, the micromirror performs the function of a switch of
input optical channels, connecting in various combinations
certain input or output elements of the microcircuit for
further processing.
The article presents the calculation of the kinematic
parameters of the mechanical structure of the micro mirror.
Practical recommendations are given for choosing the
optimal range of variation of the micro mirror tilt angles
in order to increase the strength of its structure, as well as
to reduce the power of the mechanical drive of the micro
machine required to change the micro mirror tilt angles. |
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| ISSN: | 1813-8225 2541-7541 |