Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology
CrAlN coatings were deposited onto stainless steel substrates using mid-frequency magnetron sputtering and arc-ion plating. The research comprehensively analyzes how varying substrate bias voltage influences the microstructural morphology, mechanical properties, and frictional behavior of the coatin...
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Science Press
2025-02-01
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| Series: | 工程科学学报 |
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| Online Access: | http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2024.04.26.003 |
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| author | Xiaoyan NIU Mingze LIU Guoqiang DONG Yujiang WANG Haoliang TIAN |
| author_facet | Xiaoyan NIU Mingze LIU Guoqiang DONG Yujiang WANG Haoliang TIAN |
| author_sort | Xiaoyan NIU |
| collection | DOAJ |
| description | CrAlN coatings were deposited onto stainless steel substrates using mid-frequency magnetron sputtering and arc-ion plating. The research comprehensively analyzes how varying substrate bias voltage influences the microstructural morphology, mechanical properties, and frictional behavior of the coatings using scanning electron microscopy, energy-dispersive spectroscopy, X-ray diffraction, nanoindentation, scratch test, and friction and wear tests. As the substrate bias voltage increases, the coated surface evolves from a porous with large grains to a dense and smooth state. At a bias of −60 V, the coating exhibited minimal surface particles and pores, resulting in the best overall surface quality and excellent adhesion to the substate. Moreover, all coatings displayed the composite properties of metal and metal nitride mixtures. In addition, substrate bias, a key process parameter, was found to affect particle activity and sputtering yield, thereby modulating element distribution in the coating and coating properties. The CrN, AlN, and CrAlN phases with face-centered cubic structures were observed by XRD. In particular, the addition of Al elements caused the diffraction peak of the CrAlN phase to shift to higher angles. At a substrate bias of −30 V, the coating exhibited multiple strong diffraction peaks. When the substrate bias was −60 V, the coating preferentially grew along the (200) crystal plane. However, an excessive substrate bias (−150 V) exacerbated the secondary sputtering effect during deposition, resulting in a decreased deposition rate, lattice relaxation, and recrystallization. Coatings prepared with different bias voltages consistently exhibited compressive stress, which increases with the bias voltage and, to a certain extent, improves the mechanical properties. The combined effect of growth and thermal stresses results in a higher residual stress for coatings prepared at a −150 V substrate bias. Increasing the substrate bias initially enhanced the hardness and elastic modulus of the coating; however, these properties eventually declined. The peak hardness at a −60 V substrate bias is attributed to lattice distortion, the Al solid solution in the CrN lattice, and internal stresses. Moreover, coatings at this bias level exhibited better elastic recovery and plastic deformation resistance. The friction coefficient increases rapidly over time before stabilizing, with the lowest average friction coefficient (0.75). At this bias −60 V, the coating demonstrated a low wear rate, while a higher substrate bias led to severe abrasive wear. Tuning the substrate bias voltage, allowed for effectively optimizing the microstructure, mechanical properties, frictional behavior, and wear resistance of CrAlN coatings. Notably, CrAlN coatings prepared at a substrate bias of −60 V exhibited exceptional mechanical properties and wear resistance, providing a crucial theoretical and experimental foundation for enhancing their performance in practical applications. |
| format | Article |
| id | doaj-art-e457b4bf47cf418a874ed7390dad4bc8 |
| institution | DOAJ |
| issn | 2095-9389 |
| language | zho |
| publishDate | 2025-02-01 |
| publisher | Science Press |
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| series | 工程科学学报 |
| spelling | doaj-art-e457b4bf47cf418a874ed7390dad4bc82025-08-20T02:43:32ZzhoScience Press工程科学学报2095-93892025-02-0147229630610.13374/j.issn2095-9389.2024.04.26.003240426-0003Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technologyXiaoyan NIU0Mingze LIU1Guoqiang DONG2Yujiang WANG3Haoliang TIAN4Hebei Civil Engineering Testing and Evaluation Technology Innovation Center, Hebei University, Baoding 071002, ChinaHebei Civil Engineering Testing and Evaluation Technology Innovation Center, Hebei University, Baoding 071002, ChinaHebei Civil Engineering Testing and Evaluation Technology Innovation Center, Hebei University, Baoding 071002, ChinaKey Laboratory of Defense Technology for Equipment Remanufacturing Technology, Army Armored Forces Academy, Beijing 100072, ChinaAviation Key Laboratory of Science and Technology on Advanced Corrosion and Protection for Aviation Material, AECC Beijing Institution of Aeronautical Materials, Beijing 100095, ChinaCrAlN coatings were deposited onto stainless steel substrates using mid-frequency magnetron sputtering and arc-ion plating. The research comprehensively analyzes how varying substrate bias voltage influences the microstructural morphology, mechanical properties, and frictional behavior of the coatings using scanning electron microscopy, energy-dispersive spectroscopy, X-ray diffraction, nanoindentation, scratch test, and friction and wear tests. As the substrate bias voltage increases, the coated surface evolves from a porous with large grains to a dense and smooth state. At a bias of −60 V, the coating exhibited minimal surface particles and pores, resulting in the best overall surface quality and excellent adhesion to the substate. Moreover, all coatings displayed the composite properties of metal and metal nitride mixtures. In addition, substrate bias, a key process parameter, was found to affect particle activity and sputtering yield, thereby modulating element distribution in the coating and coating properties. The CrN, AlN, and CrAlN phases with face-centered cubic structures were observed by XRD. In particular, the addition of Al elements caused the diffraction peak of the CrAlN phase to shift to higher angles. At a substrate bias of −30 V, the coating exhibited multiple strong diffraction peaks. When the substrate bias was −60 V, the coating preferentially grew along the (200) crystal plane. However, an excessive substrate bias (−150 V) exacerbated the secondary sputtering effect during deposition, resulting in a decreased deposition rate, lattice relaxation, and recrystallization. Coatings prepared with different bias voltages consistently exhibited compressive stress, which increases with the bias voltage and, to a certain extent, improves the mechanical properties. The combined effect of growth and thermal stresses results in a higher residual stress for coatings prepared at a −150 V substrate bias. Increasing the substrate bias initially enhanced the hardness and elastic modulus of the coating; however, these properties eventually declined. The peak hardness at a −60 V substrate bias is attributed to lattice distortion, the Al solid solution in the CrN lattice, and internal stresses. Moreover, coatings at this bias level exhibited better elastic recovery and plastic deformation resistance. The friction coefficient increases rapidly over time before stabilizing, with the lowest average friction coefficient (0.75). At this bias −60 V, the coating demonstrated a low wear rate, while a higher substrate bias led to severe abrasive wear. Tuning the substrate bias voltage, allowed for effectively optimizing the microstructure, mechanical properties, frictional behavior, and wear resistance of CrAlN coatings. Notably, CrAlN coatings prepared at a substrate bias of −60 V exhibited exceptional mechanical properties and wear resistance, providing a crucial theoretical and experimental foundation for enhancing their performance in practical applications.http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2024.04.26.003arc/magnetron combination deposition technologycraln coatingsubstrate biasmicrostructuremechanical propertiestribological properties |
| spellingShingle | Xiaoyan NIU Mingze LIU Guoqiang DONG Yujiang WANG Haoliang TIAN Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology 工程科学学报 arc/magnetron combination deposition technology craln coating substrate bias microstructure mechanical properties tribological properties |
| title | Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology |
| title_full | Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology |
| title_fullStr | Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology |
| title_full_unstemmed | Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology |
| title_short | Influence of substrate bias on the properties of CrAlN wear-resistant coating prepared by arc/magnetron composite technology |
| title_sort | influence of substrate bias on the properties of craln wear resistant coating prepared by arc magnetron composite technology |
| topic | arc/magnetron combination deposition technology craln coating substrate bias microstructure mechanical properties tribological properties |
| url | http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2024.04.26.003 |
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