Measuring. Monitoring. Management. Control
Background. The article is devoted to the development of constructive and technological methods for ensuring the temporal and parametric stability of films and film structures formed on metal–film sensors of physical quantities. The relevance of the presented materials lies in the fact that the st...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penza State University Publishing House
2024-12-01
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| Series: | Измерение, мониторинг, управление, контроль |
| Subjects: | |
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| Summary: | Background. The article is devoted to the development of constructive and technological methods for ensuring
the temporal and parametric stability of films and film structures formed on metal–film sensors of physical quantities.
The relevance of the presented materials lies in the fact that the stability of sensors depends to a greater extent on the
stability of resistive films and film structures. The purpose of the article is to develop reproducible designs and technologies
that ensure the formation of time-stable sensor elements and structures. Materials and methods. The article describes
in sufficient detail the proposed designs of polyfilm strain-resistant structures of various configurations. Mathematical
models of multilayer film structures are considered and analyzed, the nominal values of strain gages are determined,
and methodformation are determined. In particular, an increase in the accuracy and consistency of the electrophysical characteristics
of the sensing elements and measuring modules was achieved by 30–40 % compared with well-known Russian sensors.s for minimizing the temperature coefficients of resistive structures are determined. Results
and conclusions. As a result of the research conducted in the field of developing methods for regulating and maintaining
the temporal and parametric stability of sensor characteristics, the designs of polyfilm structures and methods of their |
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| ISSN: | 2307-5538 |