APA (7th ed.) Citation

An, J., Ham, B., Hong, G., Park, J., Kang, B., Pyo, J., . . . Baek, R. Effect of post-metallization anneal on monolithic co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS. Nature Portfolio.

Chicago Style (17th ed.) Citation

An, Jehyun, Beomjoo Ham, Giryun Hong, Jongseo Park, Bohyeon Kang, Jaeseong Pyo, Sung-Min Ahn, and Rock-Hyun Baek. Effect of Post-metallization Anneal on Monolithic Co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS. Nature Portfolio.

MLA (9th ed.) Citation

An, Jehyun, et al. Effect of Post-metallization Anneal on Monolithic Co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS. Nature Portfolio.