Polysilazane‐Coated Films Achieving Record‐High Moisture Barrier Performance with Sub‐10 Seconds Densification Using High‐Power VUV Irradiation

Abstract An ultra‐high moisture barrier compact SiNX film can be achieved from solution‐processed perhydropolysilazane (PHPS) through vacuum ultraviolet (VUV) light exposure. This study investigates the photochemical reactions and photo‐densification of PHPS‐based barrier films under varying VUV lig...

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Bibliographic Details
Main Authors: Luyang Song, He Sun, Yoshiyuki Suzuri
Format: Article
Language:English
Published: Wiley 2025-05-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.202415721
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