Multiple Ring Electrode-Based PMUT with Tunable Deflections
Ultrasonic applications such as non-destructive testing, biomedical imaging or range measurements are currently based on piezoelectric bulk transducers. Yet, these kinds of transducers with their mm to cm dimensions are rather impractical in fields in which both frequencies in the kHz region and sma...
Saved in:
| Main Authors: | Jan Helmerich, Manfred Wich, Annika Hofmann, Thomas Schaechtle, Stefan Johann Rupitsch |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/6/623 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Performance Analysis of Scandium-Doped Aluminum Nitride-Based PMUTs Under High-Temperature Conditions
by: Haochen Lyu, et al.
Published: (2025-02-01) -
ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection
by: Shutao Yao, et al.
Published: (2024-11-01) -
Multicomponent ceramic materials on the basis of PZT for the production of
piezoelectric resonators
by: D. Bochenek, et al.
Published: (2005-01-01) -
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
by: Esmaeil Afshari, et al.
Published: (2025-06-01) -
Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
by: Wenling Shang, et al.
Published: (2025-01-01)