Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films

Abstract An extensive examination of the nanoscale, crystallographic growth dynamics of the system, which is impacted by the thermal energy given to the GaN, is carried out to derive a deeper understanding of the growth kinetics, morphology and microstructure evolution, chemical bonding, and optical...

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Main Authors: Debabrata Das, Francelia Sanchez, Paul Gaurav Nalam, Nolan Herbort, Felicia S. Manciu, V. Shutthanandan, C.V. Ramana
Format: Article
Language:English
Published: Wiley-VCH 2025-03-01
Series:Advanced Materials Interfaces
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Online Access:https://doi.org/10.1002/admi.202400500
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_version_ 1849716992571867136
author Debabrata Das
Francelia Sanchez
Paul Gaurav Nalam
Nolan Herbort
Felicia S. Manciu
V. Shutthanandan
C.V. Ramana
author_facet Debabrata Das
Francelia Sanchez
Paul Gaurav Nalam
Nolan Herbort
Felicia S. Manciu
V. Shutthanandan
C.V. Ramana
author_sort Debabrata Das
collection DOAJ
description Abstract An extensive examination of the nanoscale, crystallographic growth dynamics of the system, which is impacted by the thermal energy given to the GaN, is carried out to derive a deeper understanding of the growth kinetics, morphology and microstructure evolution, chemical bonding, and optical properties of Ga─O─N films. Thermal annealing of GaN films is performed in the temperature range of 900–1200 °C. Crystal structure, phase formation, chemical composition, surface morphology, and microstructure evolution of Ga─O─N films are investigated as a function of temperature. Increasing temperature induces surface oxidation, which results in the formation of stable β‐Ga2O3 phase in the GaN matrix, where the overall film composition evolves from nitride (GaN) to oxynitride (Ga─O─N). While GaN surfaces are smooth, planar, and featureless, oxidation induced granular‐to‐rod shaped morphology evolution is seen with increasing temperature to 1200 °C. The considerable texturing and stability of the nanocrystalline Ga─O─N on Si substrates can be attributed to the surface and interface driven modification because of thermal treatment. Corroborating with structure and chemical changes, Raman spectroscopic analyses also indicate that the chemical bonding evolution progresses from fully Ga─N bonds to Ga─O─N. While the GaN oxidation process starts with the formation of β‐Ga2O3 at an annealing temperature of 1000 °C, higher annealing temperatures induce structural distortion with the potential formation of Ga─O─N bonds. The structure‐phase‐chemical composition correlation, which will be useful for nanocrystalline materials for selective optoelectronic applications, is established in Ga─O─N films made by thermal treatment of GaN.
format Article
id doaj-art-e1ca85bc8765444aaa760a63e6e99a6b
institution DOAJ
issn 2196-7350
language English
publishDate 2025-03-01
publisher Wiley-VCH
record_format Article
series Advanced Materials Interfaces
spelling doaj-art-e1ca85bc8765444aaa760a63e6e99a6b2025-08-20T03:12:48ZengWiley-VCHAdvanced Materials Interfaces2196-73502025-03-01125n/an/a10.1002/admi.202400500Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N FilmsDebabrata Das0Francelia Sanchez1Paul Gaurav Nalam2Nolan Herbort3Felicia S. Manciu4V. Shutthanandan5C.V. Ramana6Center for Advanced Materials Research (CMR) University of Texas at El Paso 500 W University Ave El Paso TX 79968 USACenter for Advanced Materials Research (CMR) University of Texas at El Paso 500 W University Ave El Paso TX 79968 USACenter for Advanced Materials Research (CMR) University of Texas at El Paso 500 W University Ave El Paso TX 79968 USACenter for Advanced Materials Research (CMR) University of Texas at El Paso 500 W University Ave El Paso TX 79968 USADepartment of Physics University of Texas at El Paso 500 W University Ave El Paso TX 79968 USADepartment of Aerospace and Mechanical Engineering University of Texas at El Paso 500 W University Ave El Paso TX 79968 USACenter for Advanced Materials Research (CMR) University of Texas at El Paso 500 W University Ave El Paso TX 79968 USAAbstract An extensive examination of the nanoscale, crystallographic growth dynamics of the system, which is impacted by the thermal energy given to the GaN, is carried out to derive a deeper understanding of the growth kinetics, morphology and microstructure evolution, chemical bonding, and optical properties of Ga─O─N films. Thermal annealing of GaN films is performed in the temperature range of 900–1200 °C. Crystal structure, phase formation, chemical composition, surface morphology, and microstructure evolution of Ga─O─N films are investigated as a function of temperature. Increasing temperature induces surface oxidation, which results in the formation of stable β‐Ga2O3 phase in the GaN matrix, where the overall film composition evolves from nitride (GaN) to oxynitride (Ga─O─N). While GaN surfaces are smooth, planar, and featureless, oxidation induced granular‐to‐rod shaped morphology evolution is seen with increasing temperature to 1200 °C. The considerable texturing and stability of the nanocrystalline Ga─O─N on Si substrates can be attributed to the surface and interface driven modification because of thermal treatment. Corroborating with structure and chemical changes, Raman spectroscopic analyses also indicate that the chemical bonding evolution progresses from fully Ga─N bonds to Ga─O─N. While the GaN oxidation process starts with the formation of β‐Ga2O3 at an annealing temperature of 1000 °C, higher annealing temperatures induce structural distortion with the potential formation of Ga─O─N bonds. The structure‐phase‐chemical composition correlation, which will be useful for nanocrystalline materials for selective optoelectronic applications, is established in Ga─O─N films made by thermal treatment of GaN.https://doi.org/10.1002/admi.202400500chemical compositionGaNGa─O─Nmicrostructuresurface texturing
spellingShingle Debabrata Das
Francelia Sanchez
Paul Gaurav Nalam
Nolan Herbort
Felicia S. Manciu
V. Shutthanandan
C.V. Ramana
Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
Advanced Materials Interfaces
chemical composition
GaN
Ga─O─N
microstructure
surface texturing
title Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
title_full Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
title_fullStr Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
title_full_unstemmed Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
title_short Effect of Thermal Oxidation on the Structure, Surface Texturing, and Microstructure Evolution in Nanocrystalline Ga─O─N Films
title_sort effect of thermal oxidation on the structure surface texturing and microstructure evolution in nanocrystalline ga─o─n films
topic chemical composition
GaN
Ga─O─N
microstructure
surface texturing
url https://doi.org/10.1002/admi.202400500
work_keys_str_mv AT debabratadas effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT franceliasanchez effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT paulgauravnalam effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT nolanherbort effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT feliciasmanciu effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT vshutthanandan effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms
AT cvramana effectofthermaloxidationonthestructuresurfacetexturingandmicrostructureevolutioninnanocrystallinegaonfilms