The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films
The paper presents the research results on the device for obtaining diamond-like films from gas phase, constructed and tested in the Institute for Nuclear Research of the National Academy of Sciences. The device is based on a high-frequency (HF) discharge (13,56 MHz) into controlled crossed magnetic...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2014-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | https://tkea.com.ua/index.php/journal/article/view/301 |
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