Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips

Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips

The resolution of a mega-electron-volt scanning transmission electron microscope (MeV-STEM) is primarily governed by the properties of the incident electron beam and angular broadening effects that occur within thick biological samples and microchips. A precise understanding and mitigation of these...

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Bibliographic Details
Main Authors: Xi Yang, Liguo Wang, Victor Smaluk, Timur Shaftan, Tianyi Wang, Nathalie Bouet, Gabriele D’Amen, Weishi Wan, Pietro Musumeci
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Nanomaterials
Subjects:
electron sample interaction
MeV-STEM/TEM
Monte Carlo simulation
angular broadening
biological sample
microchip
Online Access:https://www.mdpi.com/2079-4991/14/22/1797
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