Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling
Planar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This pa...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2025-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0030477 |
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| author | Yanding Qin Jie Yuan Yunpeng Zhang Hui Tang Jianda Han |
| author_facet | Yanding Qin Jie Yuan Yunpeng Zhang Hui Tang Jianda Han |
| author_sort | Yanding Qin |
| collection | DOAJ |
| description | Planar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This paper presents an inverse hysteresis-coupling hybrid model to account for such hysteresis and couplings. First, a specially designed kinematic chain is adopted to transfer the pose of the end effector into the linear motions at three prismatic joints. Second, an inverse hysteresis-coupling hybrid model is developed to linearize and decouple the system via a multilayer feedforward neural network. A fractional-order PID controller is also integrated to improve the motion accuracy of the overall system. Experimental results demonstrate that the proposed method can accurately control the motion of the end effector with improved accuracy and robustness. |
| format | Article |
| id | doaj-art-e13718d8c70b448aa01ef7ecd0902a1d |
| institution | Kabale University |
| issn | 2589-5540 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | Nanotechnology and Precision Engineering |
| spelling | doaj-art-e13718d8c70b448aa01ef7ecd0902a1d2025-08-20T03:38:35ZengAIP Publishing LLCNanotechnology and Precision Engineering2589-55402025-06-0182023001023001-1210.1063/10.0030477Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modelingYanding Qin0Jie Yuan1Yunpeng Zhang2Hui Tang3Jianda Han4Shenzhen Research Institute of Nankai University, Shenzhen 518083, ChinaShenzhen Research Institute of Nankai University, Shenzhen 518083, ChinaShenzhen Research Institute of Nankai University, Shenzhen 518083, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaShenzhen Research Institute of Nankai University, Shenzhen 518083, ChinaPlanar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This paper presents an inverse hysteresis-coupling hybrid model to account for such hysteresis and couplings. First, a specially designed kinematic chain is adopted to transfer the pose of the end effector into the linear motions at three prismatic joints. Second, an inverse hysteresis-coupling hybrid model is developed to linearize and decouple the system via a multilayer feedforward neural network. A fractional-order PID controller is also integrated to improve the motion accuracy of the overall system. Experimental results demonstrate that the proposed method can accurately control the motion of the end effector with improved accuracy and robustness.http://dx.doi.org/10.1063/10.0030477 |
| spellingShingle | Yanding Qin Jie Yuan Yunpeng Zhang Hui Tang Jianda Han Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling Nanotechnology and Precision Engineering |
| title | Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling |
| title_full | Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling |
| title_fullStr | Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling |
| title_full_unstemmed | Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling |
| title_short | Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling |
| title_sort | hysteresis compensation and decoupling control of an xyθ type flexure based mechanism via inverse hysteresis coupling hybrid modeling |
| url | http://dx.doi.org/10.1063/10.0030477 |
| work_keys_str_mv | AT yandingqin hysteresiscompensationanddecouplingcontrolofanxythtypeflexurebasedmechanismviainversehysteresiscouplinghybridmodeling AT jieyuan hysteresiscompensationanddecouplingcontrolofanxythtypeflexurebasedmechanismviainversehysteresiscouplinghybridmodeling AT yunpengzhang hysteresiscompensationanddecouplingcontrolofanxythtypeflexurebasedmechanismviainversehysteresiscouplinghybridmodeling AT huitang hysteresiscompensationanddecouplingcontrolofanxythtypeflexurebasedmechanismviainversehysteresiscouplinghybridmodeling AT jiandahan hysteresiscompensationanddecouplingcontrolofanxythtypeflexurebasedmechanismviainversehysteresiscouplinghybridmodeling |