Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication
This study presents a new design for a MEMS electrostatic speaker array with out-of-plane piston-like diaphragm displacement using a simplified silicon-on-insulator microfabrication process. The device comprises an array of parallel actuating membranes with small circular mechanically open but acous...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-03-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/101 |
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| author | Diogo E. Aguiam Inês S. Garcia Edoardo Sotgiu Filipe S. Alves |
| author_facet | Diogo E. Aguiam Inês S. Garcia Edoardo Sotgiu Filipe S. Alves |
| author_sort | Diogo E. Aguiam |
| collection | DOAJ |
| description | This study presents a new design for a MEMS electrostatic speaker array with out-of-plane piston-like diaphragm displacement using a simplified silicon-on-insulator microfabrication process. The device comprises an array of parallel actuating membranes with small circular mechanically open but acoustically sealed apertures that enable controlled etching of the buried oxide to be released directly from the front side, but retain a high acoustic impedance acting as a flat membrane. This approach simplifies the microfabrication process, requiring only two lithography masks and increasing process tolerances. Preliminary experimental measurements validate the concept and demonstrate the electromechanical and acoustic performance compared with theoretical models. |
| format | Article |
| id | doaj-art-e134766949424fca9b08af8cbceaef35 |
| institution | OA Journals |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-e134766949424fca9b08af8cbceaef352025-08-20T02:01:21ZengMDPI AGProceedings2504-39002024-03-0197110110.3390/proceedings2024097101Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified MicrofabricationDiogo E. Aguiam0Inês S. Garcia1Edoardo Sotgiu2Filipe S. Alves3INL—International Iberian Nanotechnology Laboratory, 4700-300 Braga, PortugalINL—International Iberian Nanotechnology Laboratory, 4700-300 Braga, PortugalINL—International Iberian Nanotechnology Laboratory, 4700-300 Braga, PortugalINL—International Iberian Nanotechnology Laboratory, 4700-300 Braga, PortugalThis study presents a new design for a MEMS electrostatic speaker array with out-of-plane piston-like diaphragm displacement using a simplified silicon-on-insulator microfabrication process. The device comprises an array of parallel actuating membranes with small circular mechanically open but acoustically sealed apertures that enable controlled etching of the buried oxide to be released directly from the front side, but retain a high acoustic impedance acting as a flat membrane. This approach simplifies the microfabrication process, requiring only two lithography masks and increasing process tolerances. Preliminary experimental measurements validate the concept and demonstrate the electromechanical and acoustic performance compared with theoretical models.https://www.mdpi.com/2504-3900/97/1/101microspeakerMEMSacoustic impedance |
| spellingShingle | Diogo E. Aguiam Inês S. Garcia Edoardo Sotgiu Filipe S. Alves Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication Proceedings microspeaker MEMS acoustic impedance |
| title | Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication |
| title_full | Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication |
| title_fullStr | Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication |
| title_full_unstemmed | Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication |
| title_short | Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication |
| title_sort | electrostatic microelectromechanical system speaker array with out of plane piston displacement and simplified microfabrication |
| topic | microspeaker MEMS acoustic impedance |
| url | https://www.mdpi.com/2504-3900/97/1/101 |
| work_keys_str_mv | AT diogoeaguiam electrostaticmicroelectromechanicalsystemspeakerarraywithoutofplanepistondisplacementandsimplifiedmicrofabrication AT inessgarcia electrostaticmicroelectromechanicalsystemspeakerarraywithoutofplanepistondisplacementandsimplifiedmicrofabrication AT edoardosotgiu electrostaticmicroelectromechanicalsystemspeakerarraywithoutofplanepistondisplacementandsimplifiedmicrofabrication AT filipesalves electrostaticmicroelectromechanicalsystemspeakerarraywithoutofplanepistondisplacementandsimplifiedmicrofabrication |