Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter
We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, wh...
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IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/7762076/ |
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| author | Chen Zhang C. K. Madsen |
| author_facet | Chen Zhang C. K. Madsen |
| author_sort | Chen Zhang |
| collection | DOAJ |
| description | We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, which substantially reduces the processing steps compared to previously reported coupling between vertically integrated As<sub>2</sub>S<sub>3</sub> and LiNbO<sub>3</sub> waveguides. The measured grating coupling loss is 3.75 dB at 1563 nm for TE polarization. In addition, a sidewall Bragg grating cavity was fabricated using the grating input and output couplers. The Bragg grating response had a full width at half maximum (FWHM) of 0.0375 nm around the resonance wavelength and a cavity free spectral range (FSR) of 0.36 nm. Applications of these vertically integrated As<sub>2</sub>S<sub>3</sub> grating couplers include 2-D beam steering using the electro-optic tuning afforded by the LiNbO<sub>3</sub> substrate and electro-optic sensing. |
| format | Article |
| id | doaj-art-e10da107dd694ec197fa3adec6d58c57 |
| institution | DOAJ |
| issn | 1943-0655 |
| language | English |
| publishDate | 2016-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-e10da107dd694ec197fa3adec6d58c572025-08-20T02:44:39ZengIEEEIEEE Photonics Journal1943-06552016-01-01861710.1109/JPHOT.2016.26162207762076Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based FilterChen Zhang0C. K. Madsen1Texas A&M University, College Station, TX, USATexas A&M University, College Station, TX, USAWe demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, which substantially reduces the processing steps compared to previously reported coupling between vertically integrated As<sub>2</sub>S<sub>3</sub> and LiNbO<sub>3</sub> waveguides. The measured grating coupling loss is 3.75 dB at 1563 nm for TE polarization. In addition, a sidewall Bragg grating cavity was fabricated using the grating input and output couplers. The Bragg grating response had a full width at half maximum (FWHM) of 0.0375 nm around the resonance wavelength and a cavity free spectral range (FSR) of 0.36 nm. Applications of these vertically integrated As<sub>2</sub>S<sub>3</sub> grating couplers include 2-D beam steering using the electro-optic tuning afforded by the LiNbO<sub>3</sub> substrate and electro-optic sensing.https://ieeexplore.ieee.org/document/7762076/Bragg gratingchalcogenide waveguidegrating couplerlithium niobatephased array |
| spellingShingle | Chen Zhang C. K. Madsen Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter IEEE Photonics Journal Bragg grating chalcogenide waveguide grating coupler lithium niobate phased array |
| title | Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter |
| title_full | Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter |
| title_fullStr | Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter |
| title_full_unstemmed | Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter |
| title_short | Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter |
| title_sort | demonstration of an as2s3 on linbo3 grating coupler and its application of measuring a grating based filter |
| topic | Bragg grating chalcogenide waveguide grating coupler lithium niobate phased array |
| url | https://ieeexplore.ieee.org/document/7762076/ |
| work_keys_str_mv | AT chenzhang demonstrationofanas2s3onlinbo3gratingcoupleranditsapplicationofmeasuringagratingbasedfilter AT ckmadsen demonstrationofanas2s3onlinbo3gratingcoupleranditsapplicationofmeasuringagratingbasedfilter |