Demonstration of an As2S3-on-LiNbO3 Grating Coupler and its Application of Measuring a Grating-based Filter
We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, wh...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7762076/ |
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| Summary: | We demonstrate the design, fabrication, and measurement results for an As<sub>2</sub>S<sub>3</sub> grating coupler on a LiNbO<sub>3</sub> substrate. The proposed coupler was fabricated by a single lithography step followed by a single reactive ion etching step, which substantially reduces the processing steps compared to previously reported coupling between vertically integrated As<sub>2</sub>S<sub>3</sub> and LiNbO<sub>3</sub> waveguides. The measured grating coupling loss is 3.75 dB at 1563 nm for TE polarization. In addition, a sidewall Bragg grating cavity was fabricated using the grating input and output couplers. The Bragg grating response had a full width at half maximum (FWHM) of 0.0375 nm around the resonance wavelength and a cavity free spectral range (FSR) of 0.36 nm. Applications of these vertically integrated As<sub>2</sub>S<sub>3</sub> grating couplers include 2-D beam steering using the electro-optic tuning afforded by the LiNbO<sub>3</sub> substrate and electro-optic sensing. |
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| ISSN: | 1943-0655 |