Laser Micromachining of Glass, Silicon, and Ceramics
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material proces...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Wiley
2015-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2015/584952 |
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| _version_ | 1850166834978881536 |
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| author | L. Rihakova H. Chmelickova |
| author_facet | L. Rihakova H. Chmelickova |
| author_sort | L. Rihakova |
| collection | DOAJ |
| description | A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided. |
| format | Article |
| id | doaj-art-de0c59c340504deb97fddc1abb70c1c4 |
| institution | OA Journals |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2015-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-de0c59c340504deb97fddc1abb70c1c42025-08-20T02:21:20ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422015-01-01201510.1155/2015/584952584952Laser Micromachining of Glass, Silicon, and CeramicsL. Rihakova0H. Chmelickova1Palacky University, RCPTM, Joint Laboratory of Optics of Palacky University and Institute of Physics of the Academy of Sciences of the Czech Republic, 17. Listopadu 50a, 77207 Olomouc, Czech RepublicInstitute of Physics of the Academy of Sciences of the Czech Republic, Joint Laboratory of Optics of Palacky University and Institute of Physics of the Academy of Sciences of the Czech Republic, 17. Listopadu 50a, 77207 Olomouc, Czech RepublicA brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.http://dx.doi.org/10.1155/2015/584952 |
| spellingShingle | L. Rihakova H. Chmelickova Laser Micromachining of Glass, Silicon, and Ceramics Advances in Materials Science and Engineering |
| title | Laser Micromachining of Glass, Silicon, and Ceramics |
| title_full | Laser Micromachining of Glass, Silicon, and Ceramics |
| title_fullStr | Laser Micromachining of Glass, Silicon, and Ceramics |
| title_full_unstemmed | Laser Micromachining of Glass, Silicon, and Ceramics |
| title_short | Laser Micromachining of Glass, Silicon, and Ceramics |
| title_sort | laser micromachining of glass silicon and ceramics |
| url | http://dx.doi.org/10.1155/2015/584952 |
| work_keys_str_mv | AT lrihakova lasermicromachiningofglasssiliconandceramics AT hchmelickova lasermicromachiningofglasssiliconandceramics |