Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃

Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃

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Bibliographic Details
Main Authors:	T. Berlicki, S. J. Osadnik
Format:	Article
Language:	English
Published:	Wiley 1980-01-01
Series:	Active and Passive Electronic Components
Online Access:	http://dx.doi.org/10.1155/APEC.6.219
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