Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃
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| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
1980-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/APEC.6.219 |
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| _version_ | 1850166206193991680 |
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| author | T. Berlicki S. J. Osadnik |
| author_facet | T. Berlicki S. J. Osadnik |
| author_sort | T. Berlicki |
| collection | DOAJ |
| format | Article |
| id | doaj-art-dda2babd15b14b188c44f9846db6baa3 |
| institution | OA Journals |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 1980-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-dda2babd15b14b188c44f9846db6baa32025-08-20T02:21:30ZengWileyActive and Passive Electronic Components0882-75161563-50311980-01-0163-421922210.1155/APEC.6.219Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃T. BerlickiS. J. Osadnikhttp://dx.doi.org/10.1155/APEC.6.219 |
| spellingShingle | T. Berlicki S. J. Osadnik Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ Active and Passive Electronic Components |
| title | Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ |
| title_full | Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ |
| title_fullStr | Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ |
| title_full_unstemmed | Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ |
| title_short | Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃ |
| title_sort | thin film al al2o3 al capacitors with dielectric layer formed at 400 8451 |
| url | http://dx.doi.org/10.1155/APEC.6.219 |
| work_keys_str_mv | AT tberlicki thinfilmalal2o3alcapacitorswithdielectriclayerformedat4008451 AT sjosadnik thinfilmalal2o3alcapacitorswithdielectriclayerformedat4008451 |