Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project

Abstract The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices ba...

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Main Authors: Bárbara Canto, Martin Otto, Arantxa Maestre, Alba Centeno, Amaia Zurutuza, Bianca Robertz, Eros Reato, Bartos Chmielak, Stefanie L. Stoll, Andreas Hemmetter, Florian Schlachter, Lisa Ehlert, Sha Li, Daniel Neumaier, Gordon Rinke, Zhenxing Wang, Max C. Lemme
Format: Article
Language:English
Published: Nature Portfolio 2025-02-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-56357-0
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author Bárbara Canto
Martin Otto
Arantxa Maestre
Alba Centeno
Amaia Zurutuza
Bianca Robertz
Eros Reato
Bartos Chmielak
Stefanie L. Stoll
Andreas Hemmetter
Florian Schlachter
Lisa Ehlert
Sha Li
Daniel Neumaier
Gordon Rinke
Zhenxing Wang
Max C. Lemme
author_facet Bárbara Canto
Martin Otto
Arantxa Maestre
Alba Centeno
Amaia Zurutuza
Bianca Robertz
Eros Reato
Bartos Chmielak
Stefanie L. Stoll
Andreas Hemmetter
Florian Schlachter
Lisa Ehlert
Sha Li
Daniel Neumaier
Gordon Rinke
Zhenxing Wang
Max C. Lemme
author_sort Bárbara Canto
collection DOAJ
description Abstract The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices based on graphene and related two-dimensional (2D) materials, namely the Experimental Pilot Line (2D-EPL) project. Here, we report the results obtained during the first and third multi-project wafer (MPW) runs completed at the end of 2022 (MPW run 1) and 2023 (MPW run 3) as an outcome of the 2D-EPL. Test devices were measured across the wafers to assess the device quality and variability before delivering the fabricated dies to the customers. Raman spectroscopy confirmed minimal structural changes in the graphene caused by the fabrication process, while electrical measurements of two different device types verified the device specifications defined in the process design kit.
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institution Kabale University
issn 2041-1723
language English
publishDate 2025-02-01
publisher Nature Portfolio
record_format Article
series Nature Communications
spelling doaj-art-dd38b6b4710b4967876cadf04ccde0c42025-02-09T12:45:02ZengNature PortfolioNature Communications2041-17232025-02-0116111010.1038/s41467-025-56357-0Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line projectBárbara Canto0Martin Otto1Arantxa Maestre2Alba Centeno3Amaia Zurutuza4Bianca Robertz5Eros Reato6Bartos Chmielak7Stefanie L. Stoll8Andreas Hemmetter9Florian Schlachter10Lisa Ehlert11Sha Li12Daniel Neumaier13Gordon Rinke14Zhenxing Wang15Max C. Lemme16AMO GmbHAMO GmbHGraphenea S.A.Graphenea S.A.Graphenea S.A.AMO GmbHRWTH Aachen University, Chair of Electronic DevicesAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAMO GmbHAbstract The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices based on graphene and related two-dimensional (2D) materials, namely the Experimental Pilot Line (2D-EPL) project. Here, we report the results obtained during the first and third multi-project wafer (MPW) runs completed at the end of 2022 (MPW run 1) and 2023 (MPW run 3) as an outcome of the 2D-EPL. Test devices were measured across the wafers to assess the device quality and variability before delivering the fabricated dies to the customers. Raman spectroscopy confirmed minimal structural changes in the graphene caused by the fabrication process, while electrical measurements of two different device types verified the device specifications defined in the process design kit.https://doi.org/10.1038/s41467-025-56357-0
spellingShingle Bárbara Canto
Martin Otto
Arantxa Maestre
Alba Centeno
Amaia Zurutuza
Bianca Robertz
Eros Reato
Bartos Chmielak
Stefanie L. Stoll
Andreas Hemmetter
Florian Schlachter
Lisa Ehlert
Sha Li
Daniel Neumaier
Gordon Rinke
Zhenxing Wang
Max C. Lemme
Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
Nature Communications
title Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
title_full Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
title_fullStr Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
title_full_unstemmed Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
title_short Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
title_sort multi project wafer runs for electronic graphene devices in the european 2d experimental pilot line project
url https://doi.org/10.1038/s41467-025-56357-0
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