Morphology of macropores in n-Si formed in NH4 F-containing solutions during photoanodization
The features of pore formation during photoanodization in electrolytes based on ammonium fluoride are studied depending on illumination, pH, current density. When comparing electrolytes with different pH (acidic and alkaline), a decrease in the pore diameter is observed at the same illumination...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2020-11-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2020/5%20(173)/79-83%20%D0%91%D0%BE%D0%BB%D0%BE%D1%82%D0%BE%D0%B2%20%D0%92.%20%D0%92.,%20%D0%9F%D0%BE%D0%BD%D0%BE%D0%BC%D0%B0%D1%80%D0%B5%D0%B2%D0%B0%20%D0%98.%20%D0%92.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf |
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| Summary: | The features of pore formation during photoanodization in
electrolytes based on ammonium fluoride are studied depending
on illumination, pH, current density. When comparing electrolytes
with different pH (acidic and alkaline), a decrease in the pore
diameter is observed at the same illumination and current densities
in alkaline HF: NH4
OH solutions at a relatively equal etching rate
in depth. In dilute HF: NH4
OH: H2
O under low illumination, there
is a direct dissolution of silicon with the formation of a «starlike» pore morphology and a branching tendency. In the case of
a concentrated solution of HF: NH4
OH 1: 4 branching is observed
with increasing current density. |
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| ISSN: | 1813-8225 2541-7541 |