From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2024-12-01
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| Series: | Micro and Nano Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007224000492 |
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| _version_ | 1850061148412444672 |
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| author | Ulrich Hofmann Nezih Ünal Jan Klikovits |
| author_facet | Ulrich Hofmann Nezih Ünal Jan Klikovits |
| author_sort | Ulrich Hofmann |
| collection | DOAJ |
| format | Article |
| id | doaj-art-da15c2cd9d044f249edcd27e9283dd55 |
| institution | DOAJ |
| issn | 2590-0072 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Micro and Nano Engineering |
| spelling | doaj-art-da15c2cd9d044f249edcd27e9283dd552025-08-20T02:50:20ZengElsevierMicro and Nano Engineering2590-00722024-12-012510028610.1016/j.mne.2024.100286From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabricationUlrich Hofmann0Nezih Ünal1Jan Klikovits2Corresponding author.; GenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, GermanyGenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, GermanyGenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, Germanyhttp://www.sciencedirect.com/science/article/pii/S2590007224000492 |
| spellingShingle | Ulrich Hofmann Nezih Ünal Jan Klikovits From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication Micro and Nano Engineering |
| title | From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication |
| title_full | From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication |
| title_fullStr | From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication |
| title_full_unstemmed | From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication |
| title_short | From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication |
| title_sort | from ghost to state of the art process corrections pec enabled e beam nanofabrication |
| url | http://www.sciencedirect.com/science/article/pii/S2590007224000492 |
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