Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance
High-performance facet couplers are essential components in the field of silicon nitride integrated photonic chips. In this work, a novel end-face coupling structure, using a double-layer SiO<sub>x</sub>N thin-film waveguide, is proposed. By precisely controlling the thickness and gap of...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-02-01
|
| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/12/2/136 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849719361959362560 |
|---|---|
| author | Zhaozhen Chen Xin Fu Lei Zhang Zhengsheng Han |
| author_facet | Zhaozhen Chen Xin Fu Lei Zhang Zhengsheng Han |
| author_sort | Zhaozhen Chen |
| collection | DOAJ |
| description | High-performance facet couplers are essential components in the field of silicon nitride integrated photonic chips. In this work, a novel end-face coupling structure, using a double-layer SiO<sub>x</sub>N thin-film waveguide, is proposed. By precisely controlling the thickness and gap of the SiO<sub>x</sub>N layers, we achieve flexible tuning of the output mode field size. This structure offers exceptional performance, including ultra-low coupling loss (TE: 0.29 dB, TM: 0.31 dB), large 3 dB alignment tolerance (±2.5 μm), and near-zero polarization-dependent loss. The optimized design strikes a favorable balance between coupling efficiency and alignment tolerance, making it well-suited for a wide range of photonic applications. |
| format | Article |
| id | doaj-art-da15a381f5364b2cb7f9709d44d488b2 |
| institution | DOAJ |
| issn | 2304-6732 |
| language | English |
| publishDate | 2025-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj-art-da15a381f5364b2cb7f9709d44d488b22025-08-20T03:12:09ZengMDPI AGPhotonics2304-67322025-02-0112213610.3390/photonics12020136Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment ToleranceZhaozhen Chen0Xin Fu1Lei Zhang2Zhengsheng Han3Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100080, ChinaState Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100080, ChinaState Key Laboratory of Advanced Optical Communications System and Networks, School of Electronics, Peking University, Beijing 100080, ChinaInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100080, ChinaHigh-performance facet couplers are essential components in the field of silicon nitride integrated photonic chips. In this work, a novel end-face coupling structure, using a double-layer SiO<sub>x</sub>N thin-film waveguide, is proposed. By precisely controlling the thickness and gap of the SiO<sub>x</sub>N layers, we achieve flexible tuning of the output mode field size. This structure offers exceptional performance, including ultra-low coupling loss (TE: 0.29 dB, TM: 0.31 dB), large 3 dB alignment tolerance (±2.5 μm), and near-zero polarization-dependent loss. The optimized design strikes a favorable balance between coupling efficiency and alignment tolerance, making it well-suited for a wide range of photonic applications.https://www.mdpi.com/2304-6732/12/2/136edge couplerssilicon photonicssilicon nitridesilicon oxynitride |
| spellingShingle | Zhaozhen Chen Xin Fu Lei Zhang Zhengsheng Han Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance Photonics edge couplers silicon photonics silicon nitride silicon oxynitride |
| title | Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance |
| title_full | Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance |
| title_fullStr | Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance |
| title_full_unstemmed | Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance |
| title_short | Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance |
| title_sort | modeling dual sio sub x sub n thin film edge coupler with ultra low loss and large alignment tolerance |
| topic | edge couplers silicon photonics silicon nitride silicon oxynitride |
| url | https://www.mdpi.com/2304-6732/12/2/136 |
| work_keys_str_mv | AT zhaozhenchen modelingdualsiosubxsubnthinfilmedgecouplerwithultralowlossandlargealignmenttolerance AT xinfu modelingdualsiosubxsubnthinfilmedgecouplerwithultralowlossandlargealignmenttolerance AT leizhang modelingdualsiosubxsubnthinfilmedgecouplerwithultralowlossandlargealignmenttolerance AT zhengshenghan modelingdualsiosubxsubnthinfilmedgecouplerwithultralowlossandlargealignmenttolerance |