Flexible Piezoresistive Film Pressure Sensor Based on Double-Sided Microstructure Sensing Layer
Flexible thin-film pressure sensors have garnered significant attention due to their applications in industrial inspection and human–computer interactions. However, due to their ultra-thin structure, these sensors often exhibit lower performance, including a narrow pressure response range and low se...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/24/8114 |
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| Summary: | Flexible thin-film pressure sensors have garnered significant attention due to their applications in industrial inspection and human–computer interactions. However, due to their ultra-thin structure, these sensors often exhibit lower performance, including a narrow pressure response range and low sensitivity, which constrains their further application. The most commonly used microstructure fabrication methods are challenging to apply to ultra-thin functional layers and may compromise the structural stability of the sensors. In this study, we present a novel design of a film pressure sensor with a double-sided microstructure sensing layer by adopting the template method. By incorporating the double-sided microstructures, the proposed thin-film pressure sensor can simultaneously achieve a high sensitivity value of 5.5 kPa<sup>−1</sup> and a wide range of 140 kPa, while maintaining a short response time of 120 ms and a low detection limit. This flexible film pressure sensor demonstrates considerable potential for distributed pressure sensing and industrial pressure monitoring applications. |
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| ISSN: | 1424-8220 |