A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials

Highlights A set of MoS2 nanosheet field-effect transistors (NSFETs) are fabricated, with two stacking nanosheet channel, in which two parallel MoS2 channels are controlled by three gate electrodes simultaneously. By building a comprehensive framework, the feasibility of replacing silicon-based comp...

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Main Authors: Yang Shen, Zhejia Zhang, Zhujun Yao, Mengge Jin, Jintian Gao, Yuhan Zhao, Wenzhong Bao, Yabin Sun, He Tian
Format: Article
Language:English
Published: SpringerOpen 2025-03-01
Series:Nano-Micro Letters
Subjects:
Online Access:https://doi.org/10.1007/s40820-025-01702-7
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author Yang Shen
Zhejia Zhang
Zhujun Yao
Mengge Jin
Jintian Gao
Yuhan Zhao
Wenzhong Bao
Yabin Sun
He Tian
author_facet Yang Shen
Zhejia Zhang
Zhujun Yao
Mengge Jin
Jintian Gao
Yuhan Zhao
Wenzhong Bao
Yabin Sun
He Tian
author_sort Yang Shen
collection DOAJ
description Highlights A set of MoS2 nanosheet field-effect transistors (NSFETs) are fabricated, with two stacking nanosheet channel, in which two parallel MoS2 channels are controlled by three gate electrodes simultaneously. By building a comprehensive framework, the feasibility of replacing silicon-based complementary field-effect transistors of 1 nm node with 2D-NSFETs provides a 2D technology solution for 1 nm nodes, i.e., “2D eq 1 nm” nodes are verified. The horizontally miniaturized 2D-NSFET achieves a frequency increase of 28% at a fixed power consumption and also obtains a similar trend in 16-bit RISC-V CPU.
format Article
id doaj-art-d7f383bad26c46aaafbceb27eaf02def
institution Kabale University
issn 2311-6706
2150-5551
language English
publishDate 2025-03-01
publisher SpringerOpen
record_format Article
series Nano-Micro Letters
spelling doaj-art-d7f383bad26c46aaafbceb27eaf02def2025-08-20T04:03:06ZengSpringerOpenNano-Micro Letters2311-67062150-55512025-03-0117111210.1007/s40820-025-01702-7A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D MaterialsYang Shen0Zhejia Zhang1Zhujun Yao2Mengge Jin3Jintian Gao4Yuhan Zhao5Wenzhong Bao6Yabin Sun7He Tian8College of Integrated Circuit Science and Engineering, Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal UniversityState Key Laboratory of ASIC and System, School of Microelectronics, Fudan UniversityInstitute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua UniversityCollege of Integrated Circuit Science and Engineering, Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal UniversityInstitute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua UniversityInstitute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua UniversityState Key Laboratory of ASIC and System, School of Microelectronics, Fudan UniversityCollege of Integrated Circuit Science and Engineering, Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal UniversityInstitute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua UniversityHighlights A set of MoS2 nanosheet field-effect transistors (NSFETs) are fabricated, with two stacking nanosheet channel, in which two parallel MoS2 channels are controlled by three gate electrodes simultaneously. By building a comprehensive framework, the feasibility of replacing silicon-based complementary field-effect transistors of 1 nm node with 2D-NSFETs provides a 2D technology solution for 1 nm nodes, i.e., “2D eq 1 nm” nodes are verified. The horizontally miniaturized 2D-NSFET achieves a frequency increase of 28% at a fixed power consumption and also obtains a similar trend in 16-bit RISC-V CPU.https://doi.org/10.1007/s40820-025-01702-7Two-dimensional semiconductors1 nm technology nodeNanosheet field-effect transistorsComplementary field-effect transistorsHorizontal scaling
spellingShingle Yang Shen
Zhejia Zhang
Zhujun Yao
Mengge Jin
Jintian Gao
Yuhan Zhao
Wenzhong Bao
Yabin Sun
He Tian
A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
Nano-Micro Letters
Two-dimensional semiconductors
1 nm technology node
Nanosheet field-effect transistors
Complementary field-effect transistors
Horizontal scaling
title A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
title_full A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
title_fullStr A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
title_full_unstemmed A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
title_short A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials
title_sort valuable and low budget process scheme of equivalized 1 nm technology node based on 2d materials
topic Two-dimensional semiconductors
1 nm technology node
Nanosheet field-effect transistors
Complementary field-effect transistors
Horizontal scaling
url https://doi.org/10.1007/s40820-025-01702-7
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