Etching Ceramic Samples with Fast Argon Atoms
A new approach to stripping surface layers from ceramics with fast atoms is proposed. The existing beam sources do not allow for a stripping rate of more than a few µm/h to be achieved. Usually, an increase in the etching rate is associated with growing flux density and energy of fast atoms, which c...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
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| Series: | Surfaces |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2571-9637/8/1/4 |
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