Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film

Nanocrystalline diamond (NCD) films are promising materials for wide-spread applications due to their outstanding characteristics of chemical, physical, and highly smooth surface. Our present work aimed at the fabrication of high performance diamond-based UV detector. NCD films were prepared by micr...

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Main Authors: C. R. Lin, D. H. Wei, M. K. BenDao, W. E. Chen, T. Y. Liu
Format: Article
Language:English
Published: Wiley 2014-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2014/492152
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author C. R. Lin
D. H. Wei
M. K. BenDao
W. E. Chen
T. Y. Liu
author_facet C. R. Lin
D. H. Wei
M. K. BenDao
W. E. Chen
T. Y. Liu
author_sort C. R. Lin
collection DOAJ
description Nanocrystalline diamond (NCD) films are promising materials for wide-spread applications due to their outstanding characteristics of chemical, physical, and highly smooth surface. Our present work aimed at the fabrication of high performance diamond-based UV detector. NCD films were prepared by microwave plasma enhanced chemical vapor deposition process, and then Au interdigital electrodes were deposited onto the surface of the as-grown NCD film by sputtering technique. Annealing procedures were conducted at various temperatures to obtain Ohmic contact of NCD/Au structure. The surface morphology, microstructure, and wettablity of the NCD films were analyzed by scanning electron microscopy, atomic forced microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, transmission electron microscopy, and water contact angle measurement, respectively. The electrical property and photoconductivity of the fabricated devices were tested for UV detection application. It was found that the NCD films possessed high sp3 fraction of 68.6%, low surface roughness of 9.6 nm, and good hydrophobicity, as deposited under working pressure of 40 Torr. Also, the NCD/Au structure annealed at 500°C exhibited a good Ohmic contact characteristic, high detection efficiency, and fast response to UV irradiation in air ambient. The proposed study indeed demonstrates prospective applications of NCD films in UV detector, photocatalyst, solar cell, and so on.
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institution OA Journals
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spelling doaj-art-d7a550b21be04eebb9ec3201200025af2025-08-20T02:20:59ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/492152492152Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin FilmC. R. Lin0D. H. Wei1M. K. BenDao2W. E. Chen3T. Y. Liu4Department of Mechanical Engineering and Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Mechanical Engineering and Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Mechanical Engineering and Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Mechanical Engineering and Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Mechanical Engineering and Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 106, TaiwanNanocrystalline diamond (NCD) films are promising materials for wide-spread applications due to their outstanding characteristics of chemical, physical, and highly smooth surface. Our present work aimed at the fabrication of high performance diamond-based UV detector. NCD films were prepared by microwave plasma enhanced chemical vapor deposition process, and then Au interdigital electrodes were deposited onto the surface of the as-grown NCD film by sputtering technique. Annealing procedures were conducted at various temperatures to obtain Ohmic contact of NCD/Au structure. The surface morphology, microstructure, and wettablity of the NCD films were analyzed by scanning electron microscopy, atomic forced microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, transmission electron microscopy, and water contact angle measurement, respectively. The electrical property and photoconductivity of the fabricated devices were tested for UV detection application. It was found that the NCD films possessed high sp3 fraction of 68.6%, low surface roughness of 9.6 nm, and good hydrophobicity, as deposited under working pressure of 40 Torr. Also, the NCD/Au structure annealed at 500°C exhibited a good Ohmic contact characteristic, high detection efficiency, and fast response to UV irradiation in air ambient. The proposed study indeed demonstrates prospective applications of NCD films in UV detector, photocatalyst, solar cell, and so on.http://dx.doi.org/10.1155/2014/492152
spellingShingle C. R. Lin
D. H. Wei
M. K. BenDao
W. E. Chen
T. Y. Liu
Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
International Journal of Photoenergy
title Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
title_full Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
title_fullStr Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
title_full_unstemmed Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
title_short Development of High-Performance UV Detector Using Nanocrystalline Diamond Thin Film
title_sort development of high performance uv detector using nanocrystalline diamond thin film
url http://dx.doi.org/10.1155/2014/492152
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