Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor
A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and expe...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2012-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/2012/834961 |
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