Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium
This work describes the influence of implantation temperature on the layer exfoliation of the H-implanted Ge substrate. For the implantation at RT, post-implantation annealing showed large exfoliated regions over the sample surface. Two depths of the exfoliated regions were observed with average val...
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| Format: | Article |
| Language: | English |
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Sumy State University
2013-05-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02002.pdf |
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| author | U. Dadwal Praveen Kumar R. Singh |
| author_facet | U. Dadwal Praveen Kumar R. Singh |
| author_sort | U. Dadwal |
| collection | DOAJ |
| description | This work describes the influence of implantation temperature on the layer exfoliation of the H-implanted Ge substrate. For the implantation at RT, post-implantation annealing showed large exfoliated regions over the sample surface. Two depths of the exfoliated regions were observed with average values of about 654 and 856 nm from the top of the H-implanted surface. In the H-implanted Ge at 300 °C, exfoliation occurred in the as-implanted state in the form of surface craters. The average depth of these craters was measured to be about 890 nm from the surface. Simulation results showed that the depth of the exfoliated regions was either located near to the damage peak or away from the H-peak depending upon the implantation temperature. |
| format | Article |
| id | doaj-art-d5f384a9ea6e4017a2587d394f0cedff |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2013-05-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-d5f384a9ea6e4017a2587d394f0cedff2025-08-20T03:06:05ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722013-05-0152020021Effect of Implantation Temperature on the Layer Exfoliation of H-implanted GermaniumU. DadwalPraveen KumarR. SinghThis work describes the influence of implantation temperature on the layer exfoliation of the H-implanted Ge substrate. For the implantation at RT, post-implantation annealing showed large exfoliated regions over the sample surface. Two depths of the exfoliated regions were observed with average values of about 654 and 856 nm from the top of the H-implanted surface. In the H-implanted Ge at 300 °C, exfoliation occurred in the as-implanted state in the form of surface craters. The average depth of these craters was measured to be about 890 nm from the surface. Simulation results showed that the depth of the exfoliated regions was either located near to the damage peak or away from the H-peak depending upon the implantation temperature.http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02002.pdfImplantationGeExfoliationAnnealin |
| spellingShingle | U. Dadwal Praveen Kumar R. Singh Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium Журнал нано- та електронної фізики Implantation Ge Exfoliation Annealin |
| title | Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium |
| title_full | Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium |
| title_fullStr | Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium |
| title_full_unstemmed | Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium |
| title_short | Effect of Implantation Temperature on the Layer Exfoliation of H-implanted Germanium |
| title_sort | effect of implantation temperature on the layer exfoliation of h implanted germanium |
| topic | Implantation Ge Exfoliation Annealin |
| url | http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02002.pdf |
| work_keys_str_mv | AT udadwal effectofimplantationtemperatureonthelayerexfoliationofhimplantedgermanium AT praveenkumar effectofimplantationtemperatureonthelayerexfoliationofhimplantedgermanium AT rsingh effectofimplantationtemperatureonthelayerexfoliationofhimplantedgermanium |