RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina

RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina

Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article pr...

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Bibliographic Details
Main Authors: S. A. Biran, D. A. Korotkevich, A. V. Korotkevich
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
anodic aluminum oxide
nanostructured materials
young's modulus
Online Access:https://doklady.bsuir.by/jour/article/view/804
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