RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article pr...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/804 |
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| _version_ | 1849771844560748544 |
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| author | S. A. Biran D. A. Korotkevich A. V. Korotkevich |
| author_facet | S. A. Biran D. A. Korotkevich A. V. Korotkevich |
| author_sort | S. A. Biran |
| collection | DOAJ |
| description | Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films. |
| format | Article |
| id | doaj-art-d5643bb17757436bb8397cdcc8e81e14 |
| institution | DOAJ |
| issn | 1729-7648 |
| language | Russian |
| publishDate | 2019-06-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj-art-d5643bb17757436bb8397cdcc8e81e142025-08-20T03:02:29ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-0107380382803RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic aluminaS. A. Biran0D. A. Korotkevich1A. V. Korotkevich2Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиToday, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films.https://doklady.bsuir.by/jour/article/view/804anodic aluminum oxidenanostructured materialsyoung's modulus |
| spellingShingle | S. A. Biran D. A. Korotkevich A. V. Korotkevich RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki anodic aluminum oxide nanostructured materials young's modulus |
| title | RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina |
| title_full | RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina |
| title_fullStr | RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina |
| title_full_unstemmed | RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina |
| title_short | RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina |
| title_sort | research on mechanical properties of mems components based on anodic alumina |
| topic | anodic aluminum oxide nanostructured materials young's modulus |
| url | https://doklady.bsuir.by/jour/article/view/804 |
| work_keys_str_mv | AT sabiran researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina AT dakorotkevich researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina AT avkorotkevich researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina |