Suspended graphene-based NEMS accelerometers with direct electrical readout
Abstract Atomically thin suspended graphene can be used as NEMS transducers for ultra-small and high-performance sensors due to its excellent mechanical and electrical properties. Most applications of suspended graphene in NEMS devices are limited to pressure sensors, resonators, switches, etc. Grap...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00969-5 |
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