Correction to “Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography”

Correction to “Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography”

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Bibliographic Details
Main Authors:	Eun‐Seok Choe, Seungwook Choi, Ansoon Kim, Kwan‐Yong Kim, Hee‐Jung Yeom, Min Young Yoon, Seongwan Hong, Dong‐Wook Kim, Jung‐Hyung Kim, Hyo‐Chang Lee
Format:	Article
Language:	English
Published:	Wiley-VCH 2025-04-01
Series:	Advanced Materials Interfaces
Online Access:	https://doi.org/10.1002/admi.202400943
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