Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance

Abstract The mobility of emerging (e.g., two-dimensional, oxide, organic) semiconductors is commonly estimated from transistor current-voltage measurements. However, such devices often experience contact gating, i.e., electric fields from the gate modulate the contact resistance during measurements,...

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Main Authors: Robert K. A. Bennett, Lauren Hoang, Connor Cremers, Andrew J. Mannix, Eric Pop
Format: Article
Language:English
Published: Nature Portfolio 2025-02-01
Series:npj 2D Materials and Applications
Online Access:https://doi.org/10.1038/s41699-024-00506-4
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author Robert K. A. Bennett
Lauren Hoang
Connor Cremers
Andrew J. Mannix
Eric Pop
author_facet Robert K. A. Bennett
Lauren Hoang
Connor Cremers
Andrew J. Mannix
Eric Pop
author_sort Robert K. A. Bennett
collection DOAJ
description Abstract The mobility of emerging (e.g., two-dimensional, oxide, organic) semiconductors is commonly estimated from transistor current-voltage measurements. However, such devices often experience contact gating, i.e., electric fields from the gate modulate the contact resistance during measurements, which can lead conventional extraction techniques to estimate mobility incorrectly even by a factor >2. Although this error can be minimized by measuring transistors at high gate-source bias |V gs|, this regime is often inaccessible in emerging devices that suffer from high contact resistance or early gate dielectric breakdown. Here, we propose a method of extracting mobility in transistors with gate-dependent contact resistance that does not require operation at high |V gs|, enabling accurate mobility extraction even in emerging transistors with strong contact gating. Our approach relies on updating the transfer length method (TLM) and can achieve <10% error even in regimes where conventional techniques overestimate mobility by >2×.
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issn 2397-7132
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spelling doaj-art-d3b23e8c88bd4e32a0c5036e4da6cf222025-08-20T03:13:14ZengNature Portfolionpj 2D Materials and Applications2397-71322025-02-01911710.1038/s41699-024-00506-4Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistanceRobert K. A. Bennett0Lauren Hoang1Connor Cremers2Andrew J. Mannix3Eric Pop4Department of Electrical Engineering, Stanford UniversityDepartment of Electrical Engineering, Stanford UniversityDepartment of Electrical Engineering, Stanford UniversityDepartment of Materials Science and Engineering, Stanford UniversityDepartment of Electrical Engineering, Stanford UniversityAbstract The mobility of emerging (e.g., two-dimensional, oxide, organic) semiconductors is commonly estimated from transistor current-voltage measurements. However, such devices often experience contact gating, i.e., electric fields from the gate modulate the contact resistance during measurements, which can lead conventional extraction techniques to estimate mobility incorrectly even by a factor >2. Although this error can be minimized by measuring transistors at high gate-source bias |V gs|, this regime is often inaccessible in emerging devices that suffer from high contact resistance or early gate dielectric breakdown. Here, we propose a method of extracting mobility in transistors with gate-dependent contact resistance that does not require operation at high |V gs|, enabling accurate mobility extraction even in emerging transistors with strong contact gating. Our approach relies on updating the transfer length method (TLM) and can achieve <10% error even in regimes where conventional techniques overestimate mobility by >2×.https://doi.org/10.1038/s41699-024-00506-4
spellingShingle Robert K. A. Bennett
Lauren Hoang
Connor Cremers
Andrew J. Mannix
Eric Pop
Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
npj 2D Materials and Applications
title Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
title_full Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
title_fullStr Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
title_full_unstemmed Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
title_short Mobility and threshold voltage extraction in transistors with gate-voltage-dependent contact resistance
title_sort mobility and threshold voltage extraction in transistors with gate voltage dependent contact resistance
url https://doi.org/10.1038/s41699-024-00506-4
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AT laurenhoang mobilityandthresholdvoltageextractionintransistorswithgatevoltagedependentcontactresistance
AT connorcremers mobilityandthresholdvoltageextractionintransistorswithgatevoltagedependentcontactresistance
AT andrewjmannix mobilityandthresholdvoltageextractionintransistorswithgatevoltagedependentcontactresistance
AT ericpop mobilityandthresholdvoltageextractionintransistorswithgatevoltagedependentcontactresistance