The effect of the coupling radii of the elements of membrane MEMS systems on their own oscillations
The regularities of changes in the frequencies and forms of natural oscillations and the stress state of a silicon sensing element of a mechanical MEMS accelerometer system depending on changes in the radii of rounding of structural elements are considered. An increase in the natural frequencies of...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2023-02-01
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| Series: | Системный анализ и прикладная информатика |
| Subjects: | |
| Online Access: | https://sapi.bntu.by/jour/article/view/589 |
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