Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering
DC power and RF power were introduced into the magnetic controlled sputtering system simultaneously to deposit AZO films in order to get an acceptable deposition rate with high quality transparency conducting thin film. The resistivity decreases with the RF power for the as-deposited samples. The re...
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2013/401392 |
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| author | Neng-Fu Shih Jin-Zhou Chen Yeu-Long Jiang |
| author_facet | Neng-Fu Shih Jin-Zhou Chen Yeu-Long Jiang |
| author_sort | Neng-Fu Shih |
| collection | DOAJ |
| description | DC power and RF power were introduced into the magnetic controlled sputtering system simultaneously to deposit AZO films in order to get an acceptable deposition rate with high quality transparency conducting thin film. The resistivity decreases with the RF power for the as-deposited samples. The resistivity of 6 × 10−4 Ω-cm and 3.5–4.5 × 10−4 Ω-cm is obtained for the as-deposited sample, and for all annealed samples, respectively. The transmittance of the AZO films with higher substrate temperature is generally above 80% for the incident light wavelength within 400–800 nm. The transmittance of the as-deposited samples reveals a clear blue shift phenomenon. The AZO films present (002) oriented preference as can be seen from the X-ray diffraction curves. All AZO films reveal compressive stress. The annealing process improves the electrical property of AZO films. A significant blue shift phenomenon has been found, which may have a great application for electrode in solar cell. |
| format | Article |
| id | doaj-art-d178f983ee53475eac0543d877aa28d7 |
| institution | OA Journals |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-d178f983ee53475eac0543d877aa28d72025-08-20T02:19:55ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422013-01-01201310.1155/2013/401392401392Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron SputteringNeng-Fu Shih0Jin-Zhou Chen1Yeu-Long Jiang2Department of Electronic Engineering, Hsiuping University of Science and Technology, Taichung 412-80, TaiwanGraduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402-27, TaiwanGraduate Institute of Optoelectronic Engineering and Department of Electrical Engineering, National Chung Hsing University, No. 250, Kuo Kuang Road, Taichung 402-27, TaiwanDC power and RF power were introduced into the magnetic controlled sputtering system simultaneously to deposit AZO films in order to get an acceptable deposition rate with high quality transparency conducting thin film. The resistivity decreases with the RF power for the as-deposited samples. The resistivity of 6 × 10−4 Ω-cm and 3.5–4.5 × 10−4 Ω-cm is obtained for the as-deposited sample, and for all annealed samples, respectively. The transmittance of the AZO films with higher substrate temperature is generally above 80% for the incident light wavelength within 400–800 nm. The transmittance of the as-deposited samples reveals a clear blue shift phenomenon. The AZO films present (002) oriented preference as can be seen from the X-ray diffraction curves. All AZO films reveal compressive stress. The annealing process improves the electrical property of AZO films. A significant blue shift phenomenon has been found, which may have a great application for electrode in solar cell.http://dx.doi.org/10.1155/2013/401392 |
| spellingShingle | Neng-Fu Shih Jin-Zhou Chen Yeu-Long Jiang Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering Advances in Materials Science and Engineering |
| title | Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering |
| title_full | Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering |
| title_fullStr | Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering |
| title_full_unstemmed | Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering |
| title_short | Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering |
| title_sort | properties and analysis of transparency conducting azo films by using dc power and rf power simultaneous magnetron sputtering |
| url | http://dx.doi.org/10.1155/2013/401392 |
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