Effect of Bias Voltage on the Microstructure and Photoelectric Properties of W-Doped ZnO Films

Effect of Bias Voltage on the Microstructure and Photoelectric Properties of W-Doped ZnO Films

W-doped ZnO (WZO) films were deposited on glass substrates by using RF magnetron sputtering at different substrate bias voltages, and the relationships between microstructure and optical and electrical properties were investigated. The results revealed that the deposition rate of WZO films first dec...

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Bibliographic Details
Main Authors: Haijuan Mei, Wanli Wang, Junfeng Zhao, Weilong Zhong, Muyi Qiu, Jiayang Xu, Kailin Gao, Ge Liu, Jianchu Liang, Weiping Gong
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Nanomaterials
Subjects:
WZO
bias voltage
microstructure
photoelectric properties
Online Access:https://www.mdpi.com/2079-4991/14/24/2050
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