Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides
Abstract Pressure sensors based on photonic integrated circuits (PIC) offer the prospect of outstanding sensitivities, extreme miniaturization and have the potential for highly scalable production using CMOS compatible processing. PIC-based pressure sensors detect the change in optical properties, i...
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Nature Portfolio
2025-06-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-025-01953-9 |
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| author | Tabea Fünning Martin Paul Costanza Lucia Manganelli Christian Wenger Andreas Mai Patrick Steglich |
| author_facet | Tabea Fünning Martin Paul Costanza Lucia Manganelli Christian Wenger Andreas Mai Patrick Steglich |
| author_sort | Tabea Fünning |
| collection | DOAJ |
| description | Abstract Pressure sensors based on photonic integrated circuits (PIC) offer the prospect of outstanding sensitivities, extreme miniaturization and have the potential for highly scalable production using CMOS compatible processing. PIC-based pressure sensors detect the change in optical properties, i.e. the intensity or phase of the optical carrier wave inside miniaturized waveguide structures. The detection of ultrasound is achieved by engineering the waveguide architecture such that a pressure causes a high change in the effective refractive index of the waveguide. A range of PIC-based pressure sensors have been reported, but a comparison of the sensitivity of the different approaches is not straightforward, since different pressure sensitive waveguide architectures as well as photonic layouts and measurement setups impact the performance. Additionally, the used sensitivity unit is not uniform throughout the different studies, further complicating a comparison. In this work, a detailed simulation study is carried out by finite element modeling of different pressure sensitive waveguide architectures for a consistent comparison. We analyze three different sensor architectures: (A) a free standing membrane located within a tiny air gap above the waveguide, (B) a waveguide located on top of a deflectable membrane as well as (C) a waveguide embedded inside a pressure-sensitive polymer cladding. The mechanical response of the structures and the resulting changes in mode propagation, i.e. the change of the effective refractive index, are analyzed. The waveguide sensitivities in RIU/MPa for different waveguide types (strip, slot) and polarization states (TE, TM) are compared. The results reveal inherent limitations of the different waveguide designs and create a basis for the selection of suitable designs for further ultrasound sensor development. Possibilities for enhancing waveguide sensitivity are identified and discussed. Additionally, we have shown that the studied approaches are extensible to SiN waveguides. |
| format | Article |
| id | doaj-art-d0504d6ff752497ba418db3d49f8099d |
| institution | OA Journals |
| issn | 2045-2322 |
| language | English |
| publishDate | 2025-06-01 |
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| spelling | doaj-art-d0504d6ff752497ba418db3d49f8099d2025-08-20T02:10:30ZengNature PortfolioScientific Reports2045-23222025-06-0115111310.1038/s41598-025-01953-9Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguidesTabea Fünning0Martin Paul1Costanza Lucia Manganelli2Christian Wenger3Andreas Mai4Patrick Steglich5IHP - Leibniz-Institute for High Performance MicroelectronicsTechnische Hochschule WildauIHP - Leibniz-Institute for High Performance MicroelectronicsIHP - Leibniz-Institute for High Performance MicroelectronicsIHP - Leibniz-Institute for High Performance MicroelectronicsIHP - Leibniz-Institute for High Performance MicroelectronicsAbstract Pressure sensors based on photonic integrated circuits (PIC) offer the prospect of outstanding sensitivities, extreme miniaturization and have the potential for highly scalable production using CMOS compatible processing. PIC-based pressure sensors detect the change in optical properties, i.e. the intensity or phase of the optical carrier wave inside miniaturized waveguide structures. The detection of ultrasound is achieved by engineering the waveguide architecture such that a pressure causes a high change in the effective refractive index of the waveguide. A range of PIC-based pressure sensors have been reported, but a comparison of the sensitivity of the different approaches is not straightforward, since different pressure sensitive waveguide architectures as well as photonic layouts and measurement setups impact the performance. Additionally, the used sensitivity unit is not uniform throughout the different studies, further complicating a comparison. In this work, a detailed simulation study is carried out by finite element modeling of different pressure sensitive waveguide architectures for a consistent comparison. We analyze three different sensor architectures: (A) a free standing membrane located within a tiny air gap above the waveguide, (B) a waveguide located on top of a deflectable membrane as well as (C) a waveguide embedded inside a pressure-sensitive polymer cladding. The mechanical response of the structures and the resulting changes in mode propagation, i.e. the change of the effective refractive index, are analyzed. The waveguide sensitivities in RIU/MPa for different waveguide types (strip, slot) and polarization states (TE, TM) are compared. The results reveal inherent limitations of the different waveguide designs and create a basis for the selection of suitable designs for further ultrasound sensor development. Possibilities for enhancing waveguide sensitivity are identified and discussed. Additionally, we have shown that the studied approaches are extensible to SiN waveguides.https://doi.org/10.1038/s41598-025-01953-9 |
| spellingShingle | Tabea Fünning Martin Paul Costanza Lucia Manganelli Christian Wenger Andreas Mai Patrick Steglich Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides Scientific Reports |
| title | Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| title_full | Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| title_fullStr | Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| title_full_unstemmed | Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| title_short | Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| title_sort | comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides |
| url | https://doi.org/10.1038/s41598-025-01953-9 |
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