APA (7th ed.) Citation

Schuegraf, K., Abraham, M. C., Brand, A., Naik, M., & Thakur, R. Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing. IEEE.

Chicago Style (17th ed.) Citation

Schuegraf, Klaus, Mathew C. Abraham, Adam Brand, Mehul Naik, and Randhir Thakur. Semiconductor Logic Technology Innovation to Achieve Sub-10 Nm Manufacturing. IEEE.

MLA (9th ed.) Citation

Schuegraf, Klaus, et al. Semiconductor Logic Technology Innovation to Achieve Sub-10 Nm Manufacturing. IEEE.